Flow Meter for SF6 or C3F8 Gas

Hello everyone,
I’m trying to find a suitable flow meter for SF6 and C3F8 gases. Has anyone tried the ATO-FLOW-MF4000 model with these gases? Link: https://www.ato.com/small-gas-mass-flow-meter
My application involves short-term testing of medical-grade gases (≥99.7% purity, less than 2000 ppm air) stored in aluminum cylinders. The gases are either 100% SF6 or 100% C3F8, and the flow range is around 5–10 SLPM. The flow meter will only be used briefly — under 2 minutes per test — to check the output of gas regulators.

Quillon wrote:
Unfortunately, our Gas Flow Meter (SKU: ATO-FLOW-MF4000) is not compatible with SF6 or C3F8 gases. Its internal sensor materials are not anti-corrosive, and therefore, we cannot guarantee performance or longevity when exposed to these gases.

If you still wish to proceed, we recommend our Gas Mass Flow Meter, SKU: ATO-FLOW-MF5000, with a flow range of 0~15 L/min.
However, please note that this model also lacks anti-corrosion protection — it may work for short, non-continuous use, but is not suitable for long-term applications.

Quillon, for what you described, the ATO-FLOW-MF5000 is a better option than the MF4000. It has a wider flow range and handles low-pressure gases quite steadily. Since your use time is under 2 minutes, it should meet your needs without sensor damage.

Thanks! I’ll go with the ATO-FLOW-MF5000 for now since it fits my short testing duration. I’ll make sure not to use it continuously.