The advantages of indoor high voltage vacuum circuit breaker are not only oil-free equipment, but also long electrical life. It has mechanical life, large breaking insulation capacity, strong continuous breaking capacity, small volume, light weight, frequent operation, fire free, less operation and maintenance, etc. And they are quickly recognized by the operation, maintenance and technical personnel of the power department. The quality of some high voltage vacuum circuit breakers is not stable enough, the current carrying voltage is on the high side during operation and some vacuum interrupters still have air leakage. With the wide application of vacuum circuit breaker, faults also occur from time to time. The author analyzes the common faults of vacuum circuit breaker and gives treatment methods.